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COPRA RS6
The COPRA RS6 plasma sources are designated for dynamic plasma deposition, etching and cleaning in roll to roll coaters or inline coaters of a width of more than 1000mm.Using a multiple arrangement of RS 6 sources in one line breaks down any limitation in substrate width and the COPRA RS6 Technology is seen to be the most power full technique for PECVD of Oxides and Nitrides in Jumbo Glass Coaters.  
    RS6 RS Baem
Substrate Width 1000 mm dynamic
Pressure Range 5E-4 to 1 mbar
Gases Any
RF-Power max. 10.000 Watt
Matching Remote
Ion Energy below 50eV
Current Density up to 3mA/cm2
Apps



Roll to Roll PECVD
Roll to Roll Cleaning
PVD Assist