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COPRA LS5
The COPRA LS5 mainly covers the 300mm range of dynamic surface treatments like for example PECVD on thin polymer foils. It also can be applied in box coaters with planetary motion in order to from wear coatings like hard DLC as well as to assist PVD sputtering processes. Please note that injected atomic radical like O or N-atoms in reactive PVD processes strongly reduces the required partial pressure of Oxygen or Nitrogen in order to achieve the right stoichiometry and enables to run the process by avoiding the contamination of metal targets.
    LS5 LS5
Substrate Width 300mm dynamic
Pressure Range 1E-4 to 1E-2 mbar
Gases Any
RF-Power max. 5000 Watt
Matching Remote
Ion Energy below 50eV
Current Density up to 3mA/cm2
Apps


Roll to Roll PECVD
Roll to Roll Cleaning
PVD Assist